Automatic UV Irradiation system
CUON Solution Co., Ltd
This system automates the removal of the protection fixing tape after dicing.
Features:
UV time adjustable
Dosage adjustable
Specification
Application wafers : 6", 8" or 8", 12”
UPH : 100 wafer/hr (8", 12")
[Based on UV time 5 sec]
Main controller : PLC
Data & GUI : PC
UV Irradiation speciation;
- 365nm wave
- High Pressure mercury lamp
- 100~1000 mj/㎠ dosage
- Lamp life time 1000 hr
- Ring blower
- UV Sensor
- HEPA filter
- Ink marking
- Scanner
- Tape expanding function
- GEM interface