Specification

Application wafer : 6", 8" or 8", 12”

Application tape : Non-UV & UV Tape

UPH : 45 wafer/hr (8"),  40 wafer/hr (12") [Based on remove speed 50 mm/s UV time 5 sec]

Main controller : PLC

Data & GUI : PC

Blade life time : 500 sheets

Wafer center accuracy : +/-0.5mm

Chuck temp : 60℃ +/-5

Tape Tension Controller: Yes

UV Irradiation specification: 

1. 365 nm wave
2. High pressure mercury lamp
3. 100~1000 mj/㎠ dosage
4. Lamp life time 1000 hr
5. Ring blower    
6. UV sensor

Options (Add-Ons)

• HEPA filter
• GEM interface